200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules

Author

Wang, Chingyue ; Nam, S.W. ; Cotte, J.M. ; Peng, Hua ; Jahnes, C.V. ; Wang, Dongping ; Bruce, Roderik ; Guillorn, M. ; Gignac, Lynne ; Advocate, W.H. ; Breslin, Chris M. ; Brink, M. ; Bucchignano, J. ; Duch, Elizabeth A. ; Galan, A. ; Kratschmer, E. ; Lit

Author_Institution

IBM T. J. Watson Res. Center, Yorktown Heights, NY, USA

fYear

2013

fDate

9-11 Dec. 2013

Abstract

We report sub-20 nm sacrificial nanochannels that enable stretching and translocating single DNA molecules. Sacrificial silicon nano-structures were etched with XeF₂ to form nanochannels. Translocations of linearized DNA single molecules were imaged by fluorescence microscopy. Our method offers a manufacturable wafer-scale approach for CMOS-compatible bio-chip platform.

Keywords

DNA; lab-on-a-chip; nanofluidics; nanostructured materials; optical microscopy; wafer-scale integration; xenon compounds; CMOS-compatible bio-chip platform; XeF₂; fluorescence microscopy; linearized DNA single molecules; manufacturable wafer-scale approach; sacrificial silicon nanostructures; single DNA molecules; size 200 mm; sub-20 nm sacrificial nanochannels; translocations; DNA; Etching; Fabrication; Fluorescence; Nanobioscience; Scanning electron microscopy; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting (IEDM), 2013 IEEE International

Conference_Location

Washington, DC

Type

conf

DOI

10.1109/IEDM.2013.6724627

Filename

6724627