DocumentCode
3088633
Title
Trade-off between SET and data retention performance thanks to innovative materials for phase-change memory
Author
Navarro, G. ; Coue, M. ; Kiouseloglou, Athanasios ; Noe, P. ; Fillot, F. ; Delaye, V. ; Persico, A. ; Roule, A. ; Bernard, M. ; Sabbione, C. ; Blachier, D. ; Sousa, V. ; Perniola, L. ; Maitrejean, Sylvian ; Cabrini, Alessandro ; Torelli, Guido ; Zuliani,
Author_Institution
LETI, CEA, Grenoble, France
fYear
2013
fDate
9-11 Dec. 2013
Abstract
In this paper, we investigate the impact of Ge-enrichment coupled to N- or C-doping in Ge2Sb2Te5 based materials on low-resistance state (LRS or SET) performance combined with high-resistance state (HRS or RESET) high-temperature data retention (HTDR) in Phase-Change Memories (PCM). These innovative materials have been integrated in state-of-the-art memory cell prototypes. For the first time, a focus on the trade-off between SET stability (which is affected by resistance drift) and RESET HTDR is proposed. This aspect has been extensively characterized. Through physico-chemical analysis and electrical characterization we demonstrate the need for a specific "programming-current-vs-time-profile" to finally achieve an LRS stable at high-working temperature with programming times compatible with industrial applications. Finally, the reliability of the HRS and the LRS obtained with our optimized programming procedure has been demonstrated through Reflow Soldering Temperature Profile (RSTP) tests. The last result fully enables PCM for embedded applications, in which data integrity after the peak temperature of reflow soldering must be ensured.
Keywords
germanium compounds; phase change memories; reflow soldering; semiconductor device reliability; semiconductor doping; Ge2Sb2Te5; RESET HTDR; SET stability; data retention performance; high resistance state; high temperature data retention; innovative materials; low resistance state; optimized programming procedure; phase change memory; physicochemical analysis; reflow soldering temperature profile tests; resistance drift; Phase change materials; Phase change memory; Programming; Resistance; Stability analysis; Thermal stability;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting (IEDM), 2013 IEEE International
Conference_Location
Washington, DC
Type
conf
DOI
10.1109/IEDM.2013.6724678
Filename
6724678
Link To Document