Platinum/AlN/Sapphire SAW resonator operating in GHz range for high temperature wireless SAW sensor

Author

Blampain, E. ; Elmazria, O. ; Legrani, O. ; McMurtry, Stefan ; Montaigne, Francois ; Fu, Chuancheng ; Lee, Kin Keung ; Yang, S.S.

Author_Institution

Inst. Jean Lamour, Univ. de Lorraine, Vandoeuvre-lès-Nancy, France

fYear

2013

fDate

21-25 July 2013

Firstpage

1081

Lastpage

1084

Abstract

In this work, Pt/AlN/Sapphire SAW resonator operating in 2.45GHz ISM band is studied as a potential sensor for high temperature and high frequency applications. Experimental characterization was realized using a specific station probe between room temperature and 500°C. Results show that electromechanical factor of the structure (K²) increase with temperature, while the quality factor decreases. The variation of frequency with temperature shows a good linearity, which is very useful for temperature sensor applications and the measured TCF of -35 ppm/°C is consisting with modeling predictions.

Keywords

Q-factor; aluminium compounds; platinum; sapphire; surface acoustic wave resonators; surface acoustic wave sensors; temperature sensors; ISM band; Pt-AlN-Al₂O₃; SAW resonator; electromechanical factor; frequency 2.45 GHz; high temperature wireless SAW sensor; platinum-AlN-sapphire; quality factor; station probe; temperature sensor; III-V semiconductor materials; Resonant frequency; Surface acoustic waves; Temperature distribution; Temperature measurement; Temperature sensors; AlN; High temperaure; SAW resonator; Sapphire; Sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2013 IEEE International

Conference_Location

Prague

ISSN

1948-5719

Print_ISBN

978-1-4673-5684-8

Type

conf

DOI

10.1109/ULTSYM.2013.0277

Filename

6724817