Correction of Nonlinearity in High-Resolution Nano-Displacement Measurements

Author

Olyaee, Saeed ; Hamedi, Samaneh

Author_Institution

Dept. of Electr. Eng., Shahid Rajaee Teacher Training Univ., Tehran

fYear

2008

fDate

18-20 Nov. 2008

Firstpage

116

Lastpage

120

Abstract

In this paper, a simple method to reduce the nonlinearity in the high-resolution nano-displacement measuring system using a modified laser interferometer is presented. By using a retarder plate and improved optical head, in additional to the nonlinearity compensation, the resolution of the displacement measurement is doubled and quadrupled compared to the conventional three- and two-mode laser interferometers, respectively. In the particular case, the nonlinearity of 18.4 nm is reduced to a value of 140 pm.

Keywords

displacement measurement; light interferometry; measurement by laser beam; optical retarders; high-resolution nanodisplacement measurement; laser interferometer; nonlinearity correction; optical head; retarder plate; Displacement measurement; High speed optical techniques; Optical interferometry; Optical mixing; Optical polarization; Optical refraction; Optical retarders; Optical sensors; Optical variables control; Signal resolution; compensator; heterodyne; interferometer; laser; nano-displacement; nonlinearity;

fLanguage

English

Publisher

ieee

Conference_Titel

High Capacity Optical Networks and Enabling Technologies, 2008. HONET 2008. International Symposium on

Conference_Location

Penang

Print_ISBN

978-1-4244-2960-8

Electronic_ISBN

978-1-4244-2961-5

Type

conf

DOI

10.1109/HONET.2008.4810220

Filename

4810220