Third-order effects in SAW and BAW device modeling

In previous works we have demonstrated the feasibility of the fast-BEM to tackle the 2D mass-loading effect. This paper is devoted to the modeling of three third-order effects in SAW and BAW devices by enhancing fast-BEM´s computational performance even further. (1) Electric charges residing on an electrode´s boundary surface outside the substrate: a model is presented for the analysis of the mass-loading effect, which accounts for the induced electric charges on an electrode´s entire boundary surface. (2) Electric charges in motion: a method has been outlined which accounts for the vibration of the electric charges on an electrode´s boundary surface. (3) 3D effects: the above-mentioned 2D models assume infinitely long electrodes. Our final model removes this restriction. We discuss the associated Green´s functions, their regularization, and the calculation of the associated higher moments for the 3D mass-loading analysis. Here also we account for the motion of the electric charges which are confined to an electrode´s boundary surface, and which follow electrode´s vibrations