Microfabricated ultrasonic transducers: towards robust models and immersion devices

Author

Ladabaum, I. ; Jin, X. ; Soh, H.T. ; Pierre, F. ; Atalar, A. ; Khuri-Yakub, B.T.

Author_Institution

Edward L. Ginzton Lab., Stanford Univ., CA, USA

Volume

1

fYear

1996

fDate

3-6 Nov 1996

Firstpage

335

Abstract

The successful fabrication of ultrasonic immersion transducers is reported. Transducers are observed to operate from 1 MHz to 20 MHz in water, with the frequency range limited by electronics, not the transducers. Transmission results are included which show that a single pair of transducers is able to operate in water at 4, 6, and 8 MHz with a signal to noise ratio of at least 48 dB. The same transducer pair is shown to operate in air at 6 MHz. A model is introduced which highlights the significant parameters of transducer design. The model enables the design of optimized transducers

Keywords

micromachining; ultrasonic transducers; underwater sound; 1 to 20 MHz; design optimization; immersion device; microfabricated ultrasonic transducer; robust model; signal to noise ratio; transducer pair; water transmission; Acoustic transducers; Biomedical transducers; Biomembranes; Etching; Gold; Piezoelectric transducers; Robustness; Signal to noise ratio; Ultrasonic imaging; Ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE

Conference_Location

San Antonio, TX

ISSN

1051-0117

Print_ISBN

0-7803-3615-1

Type

conf

DOI

10.1109/ULTSYM.1996.583986

Filename

583986