Contribution of a 3D numerical simulation to the design of micro-machined quartz microstructures

This paper is an attempt to prove the interest of a 3D simulation for micromachining of quartz. For this purpose new results related to doubly rotated plates are discussed. The 3D simulation based on the tensorial model of dissolution constitutes a convenient computer aided design for masks patterns. However, care must be taken because, for quartz crystal, the major problem remains the accurate adjustment of the dissolution slowness surface