Research on temperature controller for high vacuum annealing furnace

This paper designs a kind of fuzzy temperature controller, which is suitable for high vacuum annealing furnace. Based on the high vacuum diffusing heat process´s special characteristics, which are radiation only; the uneven temperature distribution inside furnace; the slow speed of work piece´s temperature response; and easy to produce large overshoot, the paper designs a fuzzy inference in this controller. This fuzzy inference can adjust parameter of controller automatically on line through system error and error change. Through this fuzzy inference, controller can adapt to different control objects and various states. The results of experiment show that the temperature controller has several specific characteristics, which include: high control precision, small overshoot and better adaptive control etc. This controller can definitely satisfy the request of crystal annealing technology in high vacuum.