Electron beam tester integrated into a VLSI tester

Author

Niijima, Hironobu ; Tokunaga, Yasuo ; Koshizuka, Shouichi ; Yakuwa, Kazuo ; Fazekas, Peter ; Sturm, Mathias ; Feuerbaum, Hans-Peter

Author_Institution

ADVANTEST Corp., Tokyo, Japan

fYear

1988

fDate

12-14 Sep 1988

Firstpage

908

Lastpage

913

Abstract

An integrated EB (electron-beam) testing system is constructed for precise failure analysis and reduction of total testing time, coupling a VLSI tester and an EB tester. Unique features of the system are briefly described, together with its system configuration and functions. The close connection of LSI testing and EB testing environments is further continued. It is planned to improve the integrated system to enable a simultaneous display of EB testing data in the LSI testing environment, with which it becomes possible to superimpose the EB pin data into the timing chart of normal pin data in the LSI testing. This type of connection of two environments is quite powerful and will be used in a standard testing method

Keywords

VLSI; automatic test equipment; automatic testing; electron beam applications; integrated circuit testing; programming environments; ATE; LSI testing; VLSI tester; automatic testing; integrated electron beam testing system; simultaneous display; standard testing; timing chart; Control systems; Electron beams; Electron optics; Electronic equipment testing; Failure analysis; Integrated circuit testing; Large scale integration; Software testing; System testing; Very large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

Test Conference, 1988. Proceedings. New Frontiers in Testing, International

Conference_Location

Washington, DC

ISSN

1089-3539

Print_ISBN

0-8186-0870-6

Type

conf

DOI

10.1109/TEST.1988.207879

Filename

207879