DocumentCode
3115526
Title
Pumping gases by a silicon micro pump with dynamic passive valves
Author
Gerlach, Torsten
Author_Institution
Fac. Mech. Eng., Tech. Hochschule Ilmenau, Germany
Volume
1
fYear
1997
fDate
16-19 Jun 1997
Firstpage
357
Abstract
Pumping gases by a membrane pump requires a strong compression ratio inside the pump chamber. This demand is fulfilled by an optimized micro pump with dynamic passive valves, working at the resonance frequency. The experimental results for the zero-load pump rate and the maximum pump pressure are 7.5 ml/min and 2.8 kPa, respectively. The pump´s behaviour is described by a mathematical model. The calculated values coincide with the experimental data quite well
Keywords
elemental semiconductors; microactuators; micropumps; silicon; valves; 2.8 kPa; Si; compression ratio; dynamic passive valves; mathematical model; membrane pump; micropump; pump chamber; pump pressure; resonance frequency; zero-load pump rate; Actuators; Biomembranes; Fluid dynamics; Gases; Micropumps; Pumps; Resonance; Silicon; Transducers; Valves;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location
Chicago, IL
Print_ISBN
0-7803-3829-4
Type
conf
DOI
10.1109/SENSOR.1997.613658
Filename
613658
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