Epitaxial Ba/sub x/Sr/sub 1-x/TiO/sub 3/ thin films for microwave phase shifters

Author

Kim, B.J. ; Baik, S. ; Poplavko, Y. ; Prokopenko, Y. ; Lim, J.Y. ; Kim, B.M.

Author_Institution

Dept. of Mater. Sci. & Eng., Pohang Inst. of Sci. & Technol., South Korea

fYear

2000

fDate

3-6 Dec. 2000

Firstpage

934

Lastpage

937

Abstract

A tunable phase shifter was fabricated with epitaxial Ba_0.5Sr_0.5TiO₃ (BST) thin film and gold thin film in a coplanar waveguide (CPW) configuration. The BST thin film of ~0.5 μm in thickness was deposited by laser ablation on a MgO(001) single crystalline substrate. Gold electrodes of ~2 μm in thickness was prepared by thermal evaporation, followed by electroplating and wet chemical etching. Dimensional configuration of the CPW phase shifter was determined after optimizing impedance matching at 50 ohm using FEM simulation. Epitaxial quality of the BST thin film was confirmed by X-ray diffraction. Microwave performance of the phase shifter was measured at room temperature in the frequency range of 8~12 GHz, and with applied bias voltage of up to 30 V. Effect of Mn dopant in the epitaxial films was also considered

Keywords

X-ray diffraction; barium compounds; coplanar waveguide components; epitaxial layers; ferroelectric thin films; finite element analysis; impedance matching; microwave phase shifters; pulsed laser deposition; strontium compounds; 30 V; 8 to 12 GHz; Au; BST epitaxial thin film; BaSrTiO/sub 3/; BaSrTiO/sub 3/:Mn; FEM; MgO; MgO single crystalline substrate; Mn dopant; X-ray diffraction; coplanar waveguide; electroplating; ferroelectric material; gold electrode; impedance matching; laser ablation; numerical simulation; thermal evaporation; tunable microwave phase shifter; wet chemical etching; Binary search trees; Chemical lasers; Coplanar waveguides; Gold; Phase shifters; Sputtering; Strontium; Temperature measurement; Transistors; Tunable circuits and devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2000 Asia-Pacific

Conference_Location

Sydney, NSW, Australia

Print_ISBN

0-7803-6435-X

Type

conf

DOI

10.1109/APMC.2000.925981

Filename

925981