Micro-actuation using thin film piezoelectric elements

Interest in the use of thin film actuators arose in work on scanning probe microscopes. The cantilever in such instruments, typically 100 μm long, is subject to unwanted vibration from the environment. This building and air borne vibration limits the imaging resolution of the instrument. The conventional approach is to mount the instrument on a massive isolation table. This solution is expensive and prevents the portability of the instrument. As an alternative, active vibration control of the cantilever has been investigated. Piezoelectric and electrostatic actuation have been investigated