Investigation of the maximum optical power rating for a micro-electro-mechanical device

Author

Burns, David M. ; Bright, Victor M.

Author_Institution

Air Force Inst. of Technol., Wright-Patterson AFB, OH, USA

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

335

Abstract

Reports results of an investigation of optical power induced damage to a MEMS device, and the development of a mathematical model for predicting the maximum incident optical power a MEMS device can withstand before the reflective surface is permanently damaged. The mathematical model is based on a heat flow analysis of a MEMS device in thermal equilibrium under direct illumination, and has been validated using a variety of surface-micromachined micromirrors with both thermal simulation and direct laser illumination

Keywords

blackbody radiation; heat conduction; laser beam effects; micromachining; micromechanical devices; mirrors; thermal analysis; MEMS device; Si; direct illumination; direct laser illumination; heat flow analysis; mathematical model; maximum optical power rating; micro-electro-mechanical device; optical power induced damage; polysilicon layers; reflective surface; surface-micromachined micromirrors; thermal equilibrium; thermal simulation; Glass; Gold; Microelectromechanical devices; Micromirrors; Mirrors; Optical buffering; Optical devices; Optical distortion; Optical films; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613652

Filename

613652