Mechanical characterization of microgrippers realized by LIGA technique

Author

Basrour, Skandar ; Robert, Laurent ; Ballandras, Sylvain ; Hauden, Daniel

Author_Institution

Inst. des Microtech. de Franche-Comte, Besancon, France

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

599

Abstract

Metallic microgrippers, obtained by the LIGA technique, are studied. Design methods of such devices are presented and validated by the use of finite element analysis (FEA). Details on the fabrication process are also exposed. Experimental values of Young´s modulus and residual stresses of electroformed nickel have been measured. These data are used to improve the previous FEA. Comparison between experiments and numerical predictions are finally discussed

Keywords

X-ray lithography; Young´s modulus; electroforming; finite element analysis; internal stresses; metals; microactuators; micromechanical devices; nickel; piezoelectric actuators; LIGA technique; Ni; PZT actuator; Young´s modulus; design methods; electroformed nickel; fabrication process; finite element analysis; mechanical characterization; metallic microgrippers; microgrippers; residual stresses; Actuators; Design optimization; Fabrication; Fasteners; Finite element methods; Grippers; Kinematics; Mechanical factors; Micromechanical devices; Nickel;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613722

Filename

613722