• DocumentCode
    3144038
  • Title

    Comprehensive characterization of BEOL-TDDB performance using very fast Voltage ramp Dielectric Breakdown tests

  • Author

    Aubel, O. ; Feustel, F. ; Hoffmann, T. ; Majer, M. ; Yiang, K.

  • Author_Institution
    GLOBALFOUNDRIES Dresden Module One LLC & Co. KG, Dresden, Germany
  • fYear
    2009
  • fDate
    18-22 Oct. 2009
  • Firstpage
    60
  • Lastpage
    65
  • Abstract
    In this paper we present a model to generate voltage acceleration (Vacc) values from VRDB measurements with different ramp rates. The results have been verified with TDDB measurements.
  • Keywords
    electric breakdown; BEOL-TDDB performance; VRDB measurement; time dependent dielectric breakdown; voltage acceleration; voltage ramp dielectric breakdown tests; Breakdown voltage; Condition monitoring; Dielectric breakdown; Electric breakdown; Life estimation; Life testing; Logic testing; Performance evaluation; Shape; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Integrated Reliability Workshop Final Report, 2009. IRW '09. IEEE International
  • Conference_Location
    S. Lake Tahoe, CA
  • ISSN
    1930-8841
  • Print_ISBN
    978-1-4244-3921-8
  • Electronic_ISBN
    1930-8841
  • Type

    conf

  • DOI
    10.1109/IRWS.2009.5383031
  • Filename
    5383031
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3144038