• DocumentCode
    3157073
  • Title

    Pulsed laser deposition (PLD) of ferroelectric thin films in conjunction with superconducting oxides

  • Author

    Sengupta, S. ; Sengupta, L.C. ; Kosik, W.E.

  • Author_Institution
    Metals/Ceramics Div., US Army Res. Lab., Watertown, MA, USA
  • fYear
    1991
  • fDate
    33457
  • Firstpage
    431
  • Lastpage
    434
  • Abstract
    The possibility of combining ferroelectrics and superconductors has been of interest for use in memory storage devices. Additionally, superconductors offer crystal structures compatible to the epitaxial growth of the ferroelectric, Ba0.6Sr0.4TiO3 (BSTO), which is cubic at this stoichiometry. BSTO has a lattice constant of 3.94 Å as compared to the superconducting Pr2-x CexCuO4 tetragonal single crystal which also has a lattice constant of a=3.94 Å. In this study, ferroelectric thin films of BSTO were deposited on single crystals of Pr2CuO4 and Pr2-xCexCuO4. The optical constants of the substrates, single crystals of Pr2CuO4 and Pr 2-xCexCuO4, were determined using Variable Angle Spectroscopic Ellipsometry (VASE) and the composition and crystal structure were examined using Rutherford Backscattering Spectrometry (RBS) with ion beam channeling. The substrate/film interfaces and the compositional variation in the films were also studied with RBS and with SEM/EDS. Glancing angle X-ray diffraction was used to verify the epitaxial nature of the films. The effect of the deposition parameters (laser repetition rate, oxygen backfill pressure, and deposition geometry) on the quality of the films was experimented with and the optimized parameters were used
  • Keywords
    Rutherford backscattering; X-ray diffraction; barium compounds; ellipsometry; epitaxial layers; ferroelectric materials; ferroelectric storage; ferroelectric thin films; lattice constants; optical constants; pulsed laser deposition; stoichiometry; strontium compounds; vapour phase epitaxial growth; (PrCe)2CuO4; Ba0.6Sr0.4TiO3; Pr2-xCexCuO4 tetragonal single crystal; Rutherford Backscattering Spectrometry; Variable Angle Spectroscopic Ellipsometry; compositional variation; crystal structures; cubic; deposition geometry; ferroelectric thin films; ion beam channeling; laser repetition rate; lattice constant; memory storage devices; optical constants; oxygen backfill pressure; pulsed laser deposition; stoichiometry; substrate/film interfaces; superconducting oxides; Crystals; Ferroelectric materials; Lattices; Optical pulses; Pulsed laser deposition; Spectroscopy; Sputtering; Substrates; Superconducting devices; Superconducting thin films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 1994.ISAF '94., Proceedings of the Ninth IEEE International Symposium on
  • Conference_Location
    University Park, PA
  • Print_ISBN
    0-7803-1847-1
  • Type

    conf

  • DOI
    10.1109/ISAF.1994.522394
  • Filename
    522394