Experimental analysis of above-IC inductor performance with different patterned ground shield configurations and dummy metals

Author

Sun, X. ; Carchon, G. ; Kita, Y. ; Chiba, K. ; Tani, T. ; De Raedt, W.

Author_Institution

Integrated Syst. Dept., IMEC, Leuven

fYear

2006

fDate

10-15 Sept. 2006

Firstpage

40

Lastpage

43

Abstract

This paper presents the characterization of various patterned ground shield configurations for single ended inductor layouts: center ground shield (CGS), simple ground shield (SGS) and perimeter ground shield (PGS). Experiments and simulations show that when the shields connect only to one side of single-ended above-IC inductor RF ground pad, an asymmetric Q-behavior is obtained. HFSS simulations indicate that a better performance may be obtained by a symmetrical connection of the shield to the RF ground. Furthermore, the influence of different metal shield widths and spacings, as well as the effect of dummy metal dimensions on the performance of inductors has been assessed

Keywords

Q-factor; inductors; microwave devices; shielding; Q-factors; RF ground; above-IC inductor performance; asymmetric Q-behavior; center ground shield; dummy metals; patterned ground shield configurations; perimeter ground shield; simple ground shield; single ended inductor layouts; Bars; Inductors; Parasitic capacitance; Pattern analysis; Performance analysis; Q factor; Radio frequency; Radiofrequency integrated circuits; Silicon; Spirals; Above-IC inductors; Patterned ground shield; Q-factors;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2006. 36th European

Conference_Location

Manchester

Print_ISBN

2-9600551-6-0

Type

conf

DOI

10.1109/EUMC.2006.281176

Filename

4057741