Microfabricated biosensors and microsystems

Author

Hesketh, P.J. ; Zivanovic, S. ; Ming, Y. ; Park, Soojin ; Svojanovsky, S. ; Cunneen, J. ; Caraffini, S. ; Boyd, J.G. ; Stetter, J.R. ; Lunte, S.M. ; Wilson, G.S.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Illinois Univ., Chicago, IL, USA

Volume

1

fYear

1997

fDate

14-17 Sep 1997

Firstpage

63

Abstract

Microfabrication technology has been successful in producing a wide range of miniature sensors and mechanical devices. Of particular interest is the application of this technology to biological systems. For instance an immunobiosensor for a bacterial food toxin with a sensitivity of 1 ng/mL and miniature reaction chambers have been fabricated for DNA analysis sequencing by hybridization. The integration of sensors with other components, particularly fluidic devices, offers the promise of microsystems. A miniature positive displacement micropump with a flow rate of 0.1-10 μL/min. has been fabricated, and tested with water as the working fluid. The future looks very promising for the continued development of these devices in a wide range of fields from environmental monitoring, medical sampling and diagnostics, to precision manufacturing systems

Keywords

DNA; biomedical electronics; biomedical measurement; biosensors; micromachining; micropumps; microsensors; DNA analysis sequencing; MEMS; bacterial food toxin; hybridization; immunobiosensor; microfabricated biosensors; microfabrication technology; microsystems; miniature reaction chambers; positive displacement micropump; Biological systems; Biomedical monitoring; Biosensors; DNA; Food technology; Immune system; Mechanical sensors; Microorganisms; Micropumps; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronics, 1997. Proceedings., 1997 21st International Conference on

Conference_Location

Nis

Print_ISBN

0-7803-3664-X

Type

conf

DOI

10.1109/ICMEL.1997.625184

Filename

625184