DocumentCode
3161413
Title
Patterning Copper using Ink Jet Printing of Self Assembled Monolayers
Author
Ebbens, Stephen J. ; Hutt, David A. ; Liu, Changqing
Author_Institution
Loughborough Univ., Loughborough
fYear
2007
fDate
10-12 Dec. 2007
Firstpage
114
Lastpage
119
Abstract
The ability to produce conductive copper tracks using ink-jet printing to allow the routine digital manufacture of patterned electrical interconnects is a long standing industry aim. In this study an approach to achieve this goal is investigated that uses an ink-jet printed self-assembled monolayer (SAM) coating as a molecular etch resist. To date, ink-jet printed SAMs on copper have not had sufficient quality to allow them to act in this way. However, recently an improved etching solution that enables similar quality microcontact printed SAM layers to act as resists on copper has been reported. Here this new etch solution is used to attempt to "develop" ink-jet printed SAM patterns on thin copper laminates into conductive tracks. The success of this approach and quality of resulting tracks is tested using optical microscopy, scanning electron microscopy and atomic force microscopy. This allows an assessment of the performance of this novel approach to interconnection manufacture to be made.
Keywords
atomic force microscopy; copper; etching; interconnections; monolayers; optical microscopy; resists; scanning electron microscopy; self-assembly; soft lithography; Cu; atomic force microscopy; conductive copper tracks; digital manufacture; ink jet printing; interconnection manufacture; microcontact printed layers; molecular etch resist; optical microscopy; patterned electrical interconnects; scanning electron microscopy; self assembled monolayers; thin copper laminates; Atom optics; Atomic force microscopy; Copper; Etching; Ink jet printing; Manufacturing industries; Metals industry; Optical microscopy; Resists; Scanning electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Packaging Technology Conference, 2007. EPTC 2007. 9th
Conference_Location
Singapore
Print_ISBN
978-1-4244-1323-2
Electronic_ISBN
978-1-4244-1323-2
Type
conf
DOI
10.1109/EPTC.2007.4469760
Filename
4469760
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