• DocumentCode
    3163416
  • Title

    /spl Delta/L Extraction Using Parasitic Bipolar Transistors

  • Author

    Wilson, D. ; Walton, A.J. ; Robertson, J.M. ; Holwill, R.J.

  • Author_Institution
    Univesity Of Edinburgh
  • fYear
    1988
  • fDate
    22-23 Feb. 1988
  • Firstpage
    85
  • Lastpage
    89
  • Keywords
    Artificial intelligence; Bipolar transistors; CMOS process; Electrical resistance measurement; Geometry; Length measurement; Low voltage; Microelectronics; Semiconductor device modeling; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
  • Conference_Location
    Long Beach, CA, USA
  • Type

    conf

  • DOI
    10.1109/ICMTS.1988.672940
  • Filename
    672940
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3163416