• DocumentCode
    3163483
  • Title

    Statistical Significance Of Defect density Estimates

  • Author

    Kaempf, Ulrich

  • Author_Institution
    Hewlett-packard
  • fYear
    1988
  • fDate
    22-23 Feb. 1988
  • Firstpage
    107
  • Lastpage
    113
  • Keywords
    Circuit testing; Density measurement; Design engineering; Fabrication; Integrated circuit technology; Integrated circuit testing; Integrated circuit yield; Process control; Production; Yield estimation;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
  • Conference_Location
    Long Beach, CA, USA
  • Type

    conf

  • DOI
    10.1109/ICMTS.1988.672944
  • Filename
    672944
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3163483