CMOS Compatible Fast Switching RF MEMS Varactors

Author

Lacroix, B. ; Pothier, A. ; Crunteanu, A. ; Cibert, C. ; Dumas-Bouchiat, F. ; Champeaux, C. ; Catherinot, A. ; Blondy, P.

Author_Institution

XLIM Res. Inst., Limoges

fYear

2006

fDate

10-15 Sept. 2006

Firstpage

1072

Lastpage

1075

Abstract

This paper presents fast switching RF-MEMS CMOS compatible varactors. By introducing bended sides on a conventional air bridge, it is shown experimentally that the resonance frequency of aluminum bridges is increased by a factor 2.5. Based on miniature bridges design (around ten times smaller than standard MEMS varactors), presented devices allow to reach higher mechanical resonance frequencies, resulting in faster switching times. Several designs are presented with recorded resonance frequencies between 1 and 3 MHz and measured switching time under 600 ns

Keywords

CMOS integrated circuits; bridge circuits; microswitches; varactors; 600 ns; CMOS compatible varactors; RF MEMS varactors; air bridge; aluminum bridges; fast switching varactors; mechanical resonance frequencies; Biomembranes; Bridge circuits; Micromechanical devices; Radiofrequency microelectromechanical systems; Resonance; Resonant frequency; Springs; Switches; Switching circuits; Varactors; High-speed integrated circuits; RF MEMS; varactors;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2006. 36th European

Conference_Location

Manchester

Print_ISBN

2-9600551-6-0

Type

conf

DOI

10.1109/EUMC.2006.281119

Filename

4058009

Link To Document

https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3164326