DocumentCode

316448

Title

MOSFET-structured Si field emitter tip

Author

Kanemaru, S. ; Ehara, K. ; Hirano, Takuichi ; Itoh, Jun-ichi

Author_Institution

Electrotechnical Laboratory

fYear

1997

fDate

17-21 Aug. 1997

Firstpage

34

Lastpage

37

Keywords

Controllability; Electrodes; Electron emission; FETs; Fabrication; Insulation; Ion implantation; MOSFET circuits; Silicon; Stability;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-3786-7

Type

conf

DOI

10.1109/IVMC.1997.627383

Filename

627383