• DocumentCode
    316452
  • Title

    Polycrystalline Silicon Field Emitter Arrays By Silicidation-sharpening Technique At Low Temperature

  • Author

    Lee, Jin Ho ; Song, Yoon-Ho ; Kang, Seung Youl ; Cho, Kyoung Ik ; Lee, Sang Yun ; Yoo, Hyung Joun

  • Author_Institution
    Semiconductor Technology Div., Electronics and Telecommunications Research Institute
  • fYear
    1997
  • fDate
    17-21 Aug. 1997
  • Firstpage
    53
  • Lastpage
    57
  • Keywords
    Amorphous silicon; Annealing; Dry etching; Fabrication; Field emitter arrays; Plasma temperature; Silicidation; Silicides; Sputter etching; Titanium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
  • Conference_Location
    Kyongju, Korea
  • Print_ISBN
    0-7803-3786-7
  • Type

    conf

  • DOI
    10.1109/IVMC.1997.627387
  • Filename
    627387
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=316452