DocumentCode

316476

Title

Electron Emission from Patterned Diamond Flat Cathodes

Author

Tolt, Z. Li ; Fink, R.L. ; Yaniv, Zvi

Author_Institution

FEPET, Inc.

fYear

1997

fDate

17-21 Aug. 1997

Firstpage

171

Lastpage

175

Keywords

Abrasives; Assembly; Cathodes; Degradation; Dry etching; Electron emission; Laser stability; Substrates; Testing; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-3786-7

Type

conf

DOI

10.1109/IVMC.1997.627411

Filename

627411