• DocumentCode
    316516
  • Title

    Electron emission from gated silicide field emitter arrays

  • Author

    Takai, M. ; Iriguchi, T. ; Morimoto, H. ; Hosono, A. ; Kawabuchi, S.

  • Author_Institution
    Osaka University
  • fYear
    1997
  • fDate
    17-21 Aug. 1997
  • Firstpage
    367
  • Lastpage
    370
  • Keywords
    Annealing; Atomic measurements; Coatings; Electron emission; Field emitter arrays; Materials science and technology; Niobium; Research and development; Silicidation; Silicides;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
  • Conference_Location
    Kyongju, Korea
  • Print_ISBN
    0-7803-3786-7
  • Type

    conf

  • DOI
    10.1109/IVMC.1997.627597
  • Filename
    627597
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=316516