DocumentCode
316525
Title
Microfabrication and Characterisation of Gridded Polycrystalline Silicon Field Emitter Devices
Author
Huq, S.E. ; Huang, M. ; Wilshaw, P.R. ; Prewett, P.D.
Author_Institution
Central Microstructure Facility, Rutherford Appleton Laboratory
fYear
1997
fDate
17-21 Aug. 1997
Firstpage
412
Lastpage
415
Keywords
Crystalline materials; Dry etching; Grain boundaries; Oxidation; Plasma applications; Plasma immersion ion implantation; Plasma materials processing; Plasma measurements; Polymers; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-3786-7
Type
conf
DOI
10.1109/IVMC.1997.627608
Filename
627608
Link To Document