DocumentCode
316527
Title
Resonant Fowler-Nordheim tunneling emission from metal-oxide-semiconductor cathodes
Author
Mimura, H. ; Abe, Y. ; Ikeda, J. ; Tahara, K. ; Neo, Y. ; Shimawaki, H. ; Yokoo, K.
Author_Institution
Research Institute of Electrical Communication, Tohoku University
fYear
1997
fDate
17-21 Aug. 1997
Firstpage
421
Lastpage
425
Keywords
Atomic layer deposition; Cathodes; Coherence; Electrodes; Electron beams; Electron emission; Elementary particle vacuum; Research and development; Resonance; Resonant tunneling devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-3786-7
Type
conf
DOI
10.1109/IVMC.1997.627610
Filename
627610
Link To Document