• DocumentCode
    316527
  • Title

    Resonant Fowler-Nordheim tunneling emission from metal-oxide-semiconductor cathodes

  • Author

    Mimura, H. ; Abe, Y. ; Ikeda, J. ; Tahara, K. ; Neo, Y. ; Shimawaki, H. ; Yokoo, K.

  • Author_Institution
    Research Institute of Electrical Communication, Tohoku University
  • fYear
    1997
  • fDate
    17-21 Aug. 1997
  • Firstpage
    421
  • Lastpage
    425
  • Keywords
    Atomic layer deposition; Cathodes; Coherence; Electrodes; Electron beams; Electron emission; Elementary particle vacuum; Research and development; Resonance; Resonant tunneling devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
  • Conference_Location
    Kyongju, Korea
  • Print_ISBN
    0-7803-3786-7
  • Type

    conf

  • DOI
    10.1109/IVMC.1997.627610
  • Filename
    627610