Microfabrication by hot embossing and injection molding in LIGA process

Author

Mekaru, H. ; Yamada, T. ; Sho En ; Hattori, T.

Author_Institution

Lab. of Adv. Sci. & Technol. for Ind., Himeji Inst. of Technol., Hyogo, Japan

fYear

2002

fDate

6-8 Nov. 2002

Firstpage

192

Lastpage

193

Abstract

LIGA (German acronym for Lithographite Galvanoformung and Abformung) process, that utilizes a useful industrial application of synchrotron radiation (SR), is one of the promising technologies for fabrication of extremely tall three-dimensional (3D) microstructures with a large aspect ratio. This process was lead to application of micro-machining technology. As research and studies in various fields such as micro-mechanics, micro-optics, sensor, actuator are promoted. Furthermore, the demands for microparts produced by chemical, medical, and biological technologies will be greatly increased. Focusing on the economical mass production on the microparts, precision plastic reproduction techniques such as hot embossing and injection molding are essential techniques.

Keywords

LIGA; micromachining; moulding; LIGA process; aspect ratio; hot embossing; injection molding; mass production; microfabrication; micromachining technology; plastic reproduction technique; synchrotron radiation; three-dimensional microstructure; Biosensors; Chemical and biological sensors; Chemical technology; Embossing; Fabrication; Injection molding; Microstructure; Strontium; Synchrotron radiation; Textile industry;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International

Conference_Location

Tokyo, Japan

Print_ISBN

4-89114-031-3

Type

conf

DOI

10.1109/IMNC.2002.1178609

Filename

1178609