DocumentCode
3165613
Title
Electromechanical microswitches with thermal actuation
Author
Ketterer, B. ; Bitnar, B. ; Haas, B. ; Neiger, T. ; Bachle, D. ; Glaus, F. ; Gobrecht, J.
Author_Institution
Lab. for Micro- & Nanotechnology, Paul Scherrer Inst., Villigen, Switzerland
fYear
2002
fDate
6-8 Nov. 2002
Firstpage
206
Lastpage
207
Abstract
Conventional, semiconductor based electronics has its limitations in harsh environments, e.g. operation at low or high temperatures. micro- or nanomechanical switching elements may be an alternative to be used in logic circuits provided that they can be made small and fast enough for useful data processing. in this investigation we demonstrate an integrated micromechanical switch for electric signals based on conventional silicon microprocessing technology. The design allows a significant downscaling towards high density integration.
Keywords
microswitches; electromechanical microswitches; high density integration; integrated micromechanical switch; nanomechanical switching elements; thermal actuation; Data processing; Integrated circuit technology; Logic circuits; Micromechanical devices; Microswitches; Signal processing; Silicon; Switches; Switching circuits; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International
Conference_Location
Tokyo, Japan
Print_ISBN
4-89114-031-3
Type
conf
DOI
10.1109/IMNC.2002.1178616
Filename
1178616
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