• DocumentCode
    3166739
  • Title

    A Test Structure To Measure The misalignment between Poly-si And Diffusion layers

  • Author

    Jian, Mi

  • Author_Institution
    Tianjin Univ.
  • fYear
    1988
  • fDate
    22-23 Feb. 1988
  • Firstpage
    204
  • Lastpage
    206
  • Keywords
    Area measurement; Bridge circuits; Circuit testing; Integrated circuit measurements; Integrated circuit technology; Lithography; MOSFET circuits; Microelectronics; Semiconductor device measurement; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
  • Conference_Location
    Long Beach, CA, USA
  • Type

    conf

  • DOI
    10.1109/ICMTS.1988.672962
  • Filename
    672962
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3166739