Fabrication of pyroelectric thin film ceramics by tape casting method

Author

Zhang, S.R. ; Zhong, C.W. ; Liu, R.B. ; Lin, S.W. ; Qu, C.F. ; Yao, C.H. ; Jin, Y.H.

Author_Institution

Univ. of Electron. Sci. & Technol. of China, Chengdu, China

fYear

1991

fDate

33457

Firstpage

804

Lastpage

805

Abstract

The purpose of this research is to obtain the sensitive element of infrared (IR) detector directly by tape casting method. The green tapes of pyroelectric ceramic with the thickness of 100-160 μm were cast from the slurry composed of pyroelectric ceramic powder and an appropriate binder-solvent system. The influence of a special “Sandwich” sintering process on the properties of the monolayer thin film pyroelectric ceramic were investigated. As a result smooth thin pyroelectric ceramic sheets with relative high density have been obtained. The dielectric and pyroelectric properties of samples made by tape casting were almost the same as those shaped by dry pressing process. The experiment proves that the tape casting method is a feasible process to make pyroelectric thin film ceramics

Keywords

casting; ceramics; infrared detectors; lead compounds; niobium compounds; permittivity; piezoelectricity; powder technology; pyroelectric detectors; pyroelectricity; sintering; thin film devices; 100 to 160 mum; 200 mum; IR detector fabrication; PbZrO₂-PbNbFeO₃-PbTiO₃; binder-solvent system; dielectric properties; pyroelectric ceramic powder; pyroelectric properties; pyroelectric thin film ceramics; relative high density; sandwich sintering process; sensitive element; slurry; smooth thin pyroelectric ceramic sheets; tape casting method; Ceramics; Dielectric thin films; Fabrication; Infrared detectors; Powders; Pressing; Pyroelectricity; Slurries; Tape casting; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 1994.ISAF '94., Proceedings of the Ninth IEEE International Symposium on

Conference_Location

University Park, PA

Print_ISBN

0-7803-1847-1

Type

conf

DOI

10.1109/ISAF.1994.522496

Filename

522496