DocumentCode
3174201
Title
Microsystems for chemical and biological sensing
Author
Büttgenbach, Stephanus
Author_Institution
Inst. for Microtechnology of the Tech. Univ. of Braunschweig, Braunschweig
fYear
2007
fDate
16-20 Dec. 2007
Firstpage
657
Lastpage
661
Abstract
The design and performance of exemplary microfluidic components and micro analysis systems enabling real time monitoring of chemical and biological agents will be described.
Keywords
biosensors; chemical sensors; microsensors; biological sensing; chemical sensing; micro analysis systems; microfluidic components; Biosensors; Chemicals; Fabrication; Integrated circuit technology; Microelectronics; Microfluidics; Micromachining; Monitoring; Performance analysis; Sampling methods; Lab-on-chip technology; biochemical sensing; microfluidics;
fLanguage
English
Publisher
ieee
Conference_Titel
Physics of Semiconductor Devices, 2007. IWPSD 2007. International Workshop on
Conference_Location
Mumbai
Print_ISBN
978-1-4244-1728-5
Electronic_ISBN
978-1-4244-1728-5
Type
conf
DOI
10.1109/IWPSD.2007.4472605
Filename
4472605
Link To Document