An improved transmission line pulsing (TLP) setup for electrostatic discharge (ESD) testing in semiconductor devices and ICs

Author

Lee, J.C. ; Young, R. ; Liou, J.J. ; Croft, G.D. ; Bernier, J.C.

Author_Institution

RF/Analog SiGe BiCMOS Device Modeling Group, IBM Corp., Burlington, VT, USA

fYear

2001

fDate

2001

Firstpage

233

Lastpage

238

Abstract

Transmission line pulsing (TLP) is a useful technique to characterize electrostatic discharge (ESD) events in semiconductor devices. The pulse waveforms generated by a typical TLP set-up, however, are often distorted and oscillatory. In this paper, a new and simple experimental set-up is developed to improve the shape of the TLP waveforms and thus to increase the effectiveness of the TLP technique. Experimental results obtained from the conventional and improved set-ups are presented and compared

Keywords

electrostatic discharge; integrated circuit reliability; integrated circuit testing; semiconductor device reliability; semiconductor device testing; transmission lines; ESD events; ESD testing; TLP set-up; TLP technique effectiveness; TLP waveform shape; distorted oscillatory pulse waveforms; electrostatic discharge events; electrostatic discharge testing; pulse waveforms; semiconductor ICs; semiconductor devices; transmission line pulsing; Circuit testing; Coaxial cables; Distributed parameter circuits; Electrostatic discharge; Impedance; MOS devices; Pulse generation; Semiconductor devices; Transmission lines; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Test Structures, 2001. ICMTS 2001. Proceedings of the 2001 International Conference on

Conference_Location

Kobe

Print_ISBN

0-7803-6511-9

Type

conf

DOI

10.1109/ICMTS.2001.928668

Filename

928668