• DocumentCode
    3181342
  • Title

    Methodology of the Automated MEMS Design

  • Author

    Teslyuk, Vasyl ; Lobur, Mykhaylo ; Denysyuk, Pavlo ; Kolesnyk, Konstantin

  • fYear
    2007
  • fDate
    23-26 May 2007
  • Firstpage
    84
  • Lastpage
    85
  • Abstract
    In this paper, the automated MEMS design at system level is offered which is based on the generation of large number of alternative decisions on the basis of a developed AND-OR - tree, the method of alternative decision quantity decrease and multicriterion optimization task quantity decrease.
  • Keywords
    electronic design automation; micromechanical devices; AND-OR-tree; alternative decision; automated MEMS design; multicriterion optimization task quantity; Acceleration; Additives; Capacitive sensors; Casting; Design methodology; Design optimization; Manufacturing; Microactuators; Micromechanical devices; Microsensors; MEMS; alternative MEMS structure determination; design; methodology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Perspective Technologies and Methods in MEMS Design, 2007. MEMSTECH 2007. International Conference on
  • Conference_Location
    Lviv-Polyana
  • Print_ISBN
    978-966-553-614-7
  • Type

    conf

  • DOI
    10.1109/MEMSTECH.2007.4283431
  • Filename
    4283431
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3181342