The Hummingbird minipositioner-providing three-axis motion at 50 g´s with low reactions

Author

Karidis, J.P. ; McVicker, G. ; Pawletko, J.P. ; Zai, L.C. ; Goldowsky, M. ; Brown, R.E. ; Comulada, R.R.

Author_Institution

IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA

fYear

1992

fDate

12-14 May 1992

Firstpage

685

Abstract

The Hummingbird minipositioner is a three-axis servo-mechanism designed to provide fast and accurate positioning of a low-mass probe tip on or above a nearly planar object. Peak XYZ accelerations in excess of 500 m/s² (50 g) are obtained, with positioning resolution under 1 μm and a workspace of 13 by 13 by 1 mm. The system weighs 950 g and is nearly reactionless during X-Y motion to simplify integration with large-area positioners. The design of the dynamically balanced five-bar linkage assembly and the Z-actuator is presented, along with data on in-plane linkage resonances (shown to be >1 kHz) and the torque cancellation effectiveness. A typical incremental move of 5 mm with 50 g peak acceleration and a move time of 8 ms is also presented

Keywords

micromechanical devices; robots; servomechanisms; 0.950 kg; 1 mm; 13 mm; Hummingbird minipositioner; Z-actuator; acceleration 500 m/s²; dynamically balanced five-bar linkage assembly; in-plane linkage resonances; nearly planar positioning; three-axis motion; Acceleration; Actuators; Assembly; Couplings; Electronic components; Payloads; Probes; Resonance; Torque; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Robotics and Automation, 1992. Proceedings., 1992 IEEE International Conference on

Conference_Location

Nice

Print_ISBN

0-8186-2720-4

Type

conf

DOI

10.1109/ROBOT.1992.220288

Filename

220288