DocumentCode
3182822
Title
Integration of complementary NPN and PNP InAlAs/InGaAs HBTs
Author
Cui, Delong ; Pavlidis, Dimitris ; Sawdai, Donald ; Chin, Patrick ; Block, Tom
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
fYear
2001
fDate
2001
Firstpage
497
Lastpage
500
Abstract
In this work, monolithic integration of NPN and PNP InAlAs/InGaAs complementary HBTs was demonstrated using a regrowth approach by MBE. The integrated HBTs showed little degradation over similar discrete devices. The DC gain was 35 for both integrated NPN and PNP HBTs. fT of 79.6 GHz and fmax of 109 GHz were achieved for NPN devices while fT of 11.6 GHz and fmax of 22.6 GHz were achieved for PNP devices
Keywords
III-V semiconductors; aluminium compounds; bipolar transistors; gallium arsenide; indium compounds; molecular beam epitaxial growth; 109 GHz; 11.6 GHz; 22.6 GHz; 79.6 GHz; DC gain; InAlAs-InGaAs; MBE regrowth; complementary NPN InAlAs/InGaAs HBT; complementary PNP InAlAs/InGaAs HBT; cutoff frequency; maximum oscillation frequency; monolithic integration; Etching; Heterojunction bipolar transistors; Indium compounds; Indium gallium arsenide; Indium phosphide; Insulation; Monolithic integrated circuits; Silicon compounds; Space technology; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials, 2001. IPRM. IEEE International Conference On
Conference_Location
Nara
ISSN
1092-8669
Print_ISBN
0-7803-6700-6
Type
conf
DOI
10.1109/ICIPRM.2001.929188
Filename
929188
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