A Si micro conveyer system based on electrostatic comb-drive actuators

Author

Pham, Phuc Hong ; Dao, Dzung Viet ; Amaya, Satoshi ; Kitada, Ryoji ; Shipeng, Li ; Sugiyama, Susumu

Author_Institution

Ritsumeikan Univ., Shiga

fYear

2005

fDate

7-9 Nov. 2005

Firstpage

149

Lastpage

153

Abstract

We report a design and fabrication of micro conveyer system (MCS) based on electrostatic comb-drive actuators using SOI wafer. This MCS consists of linear comb actuator, rotational comb actuator, micro containers, and ratchet mechanism. Micro containers, used for carrying micro and nano samples such as protein, cells, are moved by comb-actuators through ratchet teeth. Each MCS, which has dimension of 1 times 1 cm², is fabricated by using ICP-RIE and vapor HF etching techniques. The fabricated comb actuators were tested for electrostatic effect. Experiment results were very close to the simulation results

Keywords

conveyors; electrostatic actuators; etching; micromachining; silicon; silicon-on-insulator; SOI wafer; Si micro conveyer system; electrostatic comb-drive actuators; linear comb actuator; micro containers; ratchet mechanism; rotational comb actuator; vapor HF etching techniques; Assembly systems; Containers; Electrostatic actuators; Etching; Fabrication; Hafnium; Hydraulic actuators; Micromechanical devices; Silicon; Teeth;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro-NanoMechatronics and Human Science, 2005 IEEE International Symposium on

Conference_Location

Nagoya

Print_ISBN

0-7803-9482-8

Type

conf

DOI

10.1109/MHS.2005.1589979

Filename

1589979