• DocumentCode
    3192868
  • Title

    Integrated tunable VCSELs with simple MEMS technology

  • Author

    Kögel, B. ; Abbaszadehbanaeiyan, A. ; Westbergh, P. ; Haglund, Å ; Gustavsson, J. ; Bengtsson, J. ; Haglund, E. ; Frederiksen, H. ; Debernardi, P. ; Larsson, A.

  • Author_Institution
    Dept. of Microtechnol. & Nanosci. (MC2), Chalmers Univ. of Technol., Göteborg, Sweden
  • fYear
    2010
  • fDate
    26-30 Sept. 2010
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    A simple MEMS technology for wafer-scale fabrication of tunable VCSELs is presented. Reflown photo-resist droplets serve as preform for making curved movable micro-mirrors. First devices show a tuning range of 15 nm with mW-output power.
  • Keywords
    micromirrors; photoresists; surface emitting lasers; wafer-scale integration; MEMS technology; integrated tunable VCSEL; micromirrors; reflown photo-resist droplets; wafer-scale fabrication; Apertures; Distributed Bragg reflectors; Micromechanical devices; Resists; Tuning; Vertical cavity surface emitting lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Laser Conference (ISLC), 2010 22nd IEEE International
  • Conference_Location
    Kyoto
  • ISSN
    0899-9406
  • Print_ISBN
    978-1-4244-5683-3
  • Type

    conf

  • DOI
    10.1109/ISLC.2010.5642636
  • Filename
    5642636
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3192868