• DocumentCode
    3194536
  • Title

    Properties Of Diamond-like Carbon Films And Its Application For Protective Layers Of Thin Film Magnetic Recording Disks

  • Author

    Kokaku, Y. ; Matsumoto, M. ; lnaba, H. ; Fujimaki, S. ; Abei, K. ; Kitoh, M.

  • Author_Institution
    Hitachi Ltd.,
  • fYear
    1993
  • fDate
    13-16 April 1993
  • Keywords
    Diamond-like carbon; Internal stresses; Magnetic films; Magnetic recording; Mechanical factors; Plasma properties; Protection; Substrates; Testing; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Magnetics Conference, 1993. INTERMAG '93., Digest of International
  • Conference_Location
    Stockhom, Sweden
  • Print_ISBN
    0-7803-1310-0
  • Type

    conf

  • DOI
    10.1109/INTMAG.1993.642772
  • Filename
    642772
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3194536