DocumentCode
3200074
Title
Novel hermetic and low cost glass-capping technology for wafer-level-packaging of optical devices
Author
Hansen, Ulli ; Maus, Simon ; Leib, Juergen ; Toepper, Michael
Author_Institution
MSG Lithoglas AG, Berlin, Germany
fYear
2010
fDate
13-16 Sept. 2010
Firstpage
1
Lastpage
5
Abstract
The novel wafer-level packaging (WLP) process invented allows hermetic capping of optical devices on wafer-level yielding miniaturized glass cavity windows on top of the optical area, at the same time leaving the contact area accessible for standard electrical connections i.e. wire bond. These optical cavity packages are used within standard chip-on-board (COB) assemblies for high performance optical applications providing high yields and utmost reliability for miniaturized optical devices at low costs.
Keywords
chip-on-board packaging; hermetic seals; integrated optoelectronics; micromechanical devices; wafer level packaging; COB assembly; MEMS device; WLP process; chip-on-board assembly; contact area; glass capping technology; hermetic capping technology; miniaturized glass cavity windows; miniaturized optical device; optical applications; optical area; standard electrical connections; wafer level packaging; wire bond; Cavity resonators; Glass; Optical imaging; Optical sensors; Performance evaluation; Resists;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic System-Integration Technology Conference (ESTC), 2010 3rd
Conference_Location
Berlin
Print_ISBN
978-1-4244-8553-6
Electronic_ISBN
978-1-4244-8554-3
Type
conf
DOI
10.1109/ESTC.2010.5642987
Filename
5642987
Link To Document