• DocumentCode
    3200074
  • Title

    Novel hermetic and low cost glass-capping technology for wafer-level-packaging of optical devices

  • Author

    Hansen, Ulli ; Maus, Simon ; Leib, Juergen ; Toepper, Michael

  • Author_Institution
    MSG Lithoglas AG, Berlin, Germany
  • fYear
    2010
  • fDate
    13-16 Sept. 2010
  • Firstpage
    1
  • Lastpage
    5
  • Abstract
    The novel wafer-level packaging (WLP) process invented allows hermetic capping of optical devices on wafer-level yielding miniaturized glass cavity windows on top of the optical area, at the same time leaving the contact area accessible for standard electrical connections i.e. wire bond. These optical cavity packages are used within standard chip-on-board (COB) assemblies for high performance optical applications providing high yields and utmost reliability for miniaturized optical devices at low costs.
  • Keywords
    chip-on-board packaging; hermetic seals; integrated optoelectronics; micromechanical devices; wafer level packaging; COB assembly; MEMS device; WLP process; chip-on-board assembly; contact area; glass capping technology; hermetic capping technology; miniaturized glass cavity windows; miniaturized optical device; optical applications; optical area; standard electrical connections; wafer level packaging; wire bond; Cavity resonators; Glass; Optical imaging; Optical sensors; Performance evaluation; Resists;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic System-Integration Technology Conference (ESTC), 2010 3rd
  • Conference_Location
    Berlin
  • Print_ISBN
    978-1-4244-8553-6
  • Electronic_ISBN
    978-1-4244-8554-3
  • Type

    conf

  • DOI
    10.1109/ESTC.2010.5642987
  • Filename
    5642987