Design of a MEMS sensor for surgical handpiece

This paper presents design and characterization of a MEMS comb accelerometer designated for integration into surgical probe to detect tissue hardness during cataract removal surgery. It helps the surgeon to avoid rupturing posterior lens capsule which if occurs leads to severe complications such as glaucoma, infection, or even blindness. The microsensor having overall dimensions of 480 ¿m × 395 ¿m consisted of 41 pairs of comb fingers on each side plus suspension springs, inertial mass and support anchors. Its ability to deliver significant capacitance variations during encountered vibration situations makes it capable to distinguish between different types of tissue. Integration of electronic components on chip ensures high level of reliability and noise immunity while minimizes space and power requirements. Physical characteristics and results on performance testing, proves integration of microsensor as an effective tool to aid the surgeon during the surgery.