Offset compensation of capacitive sensors for electrostatic microactuators

Author

Min, Dong-Ki ; Jeon, Jong Up

Author_Institution

MEMS Lab., Samsung Adv. Inst. of Technol., South Korea

Volume

3

fYear

2001

fDate

2001

Firstpage

2114

Abstract

An offset problem caused by the static parasitic capacitors is analyzed and then some techniques to reduce their effect on the capacitive position sensor are represented. Using a charge balancing technique, the offset problem is compensated. By adjusting the magnitudes of the modulating signals, the charge imbalance between electrodes caused by the parasitic capacitors is eliminated without sensor gain variation. Simulation results are given to validate the proposed compensation technique

Keywords

capacitive sensors; compensation; electrodes; electrostatic actuators; position measurement; capacitive position sensor; capacitive sensors; charge balancing technique; charge imbalance; compensation technique; electrostatic microactuators; modulating signals magnitude adjustment; offset compensation; parasitic capacitors; sensor gain variation; static parasitic capacitors; Capacitive sensors; Capacitors; Circuits; Demodulation; Electrodes; Electrostatic actuators; Microactuators; Parasitic capacitance; Phase modulation; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Industrial Electronics, 2001. Proceedings. ISIE 2001. IEEE International Symposium on

Conference_Location

Pusan

Print_ISBN

0-7803-7090-2

Type

conf

DOI

10.1109/ISIE.2001.932043

Filename

932043