DocumentCode
3218416
Title
Secondary electron emission database
Author
Yater, J.E. ; Shih, A. ; Hor, C. ; Levush, B.
Author_Institution
Electron. Sci. & Technol. Div., Naval Res. Lab., Washington, DC, USA
fYear
2004
fDate
27-29 April 2004
Firstpage
148
Lastpage
149
Abstract
We have designed a unique measurement system that will enable backscattered electron data collection in the complete (energy and angle) parameter space. Specifically, this design allows for the incident beam energy to extend from 50 eV up to 30 keV. Secondly, sample rotation allows for variation of the incident angle. Finally, and most importantly, the moveable detector, which can travel in two independent angular directions, can cover the entire 3D emission space and measure the emitted electrons with an angular resolution of 2°.
Keywords
electron backscattering; microwave tubes; secondary electron emission; 3D emission space; 50 eV to 30 keV; angular resolution; backscattered electron data collection; complete parameter space; linear beam devices; measurement system; moveable detector; multistage depressed collectors; sample rotation; secondary electron emission database; total secondary electron yield; Circuits; Copper; Databases; Electrodes; Electron beams; Electron emission; Energy measurement; Geometry; Heating; Laboratories;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Electronics Conference, 2004. IVEC 2004. Fifth IEEE International
Print_ISBN
0-7803-8261-7
Type
conf
DOI
10.1109/IVELEC.2004.1316242
Filename
1316242
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