Nondestructive Depth Profiling Of Semiconductor Multilayer Structures By Resonant Attenuated Total Reflectance (ATR) Techniques

Author

Bosacchi, B. ; Oehrle, R.C. ; Cook, T.B. ; De La Rosa, J.G.

Author_Institution

AT&T Engineering Research Center

fYear

1988

fDate

2-4 Nov 1988

Firstpage

258

Lastpage

258

Keywords

Hafnium; Nonhomogeneous media; Optical reflection; Reflectivity; Resonance; TV; Wavelength measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society Annual Meeting, 1988. Conference Proceedings. LEOS '88.

Type

DOI

10.1109/LEOS.1988.689819

Filename

689819

Link To Document