Tunable RF filters with graded-composition, MOCVD-deposited BST Capacitors

Author

Kalkur, Thottam S. ; Sbrockey, Nick ; Loung, M. ; Cole, M.W. ; Tompa, Gary

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Colorado, Colorado Springs, CO, USA

fYear

2011

fDate

24-27 July 2011

Firstpage

1

Lastpage

4

Abstract

In this paper, we report the electrical characteristics of compositionally graded BST films deposited by metal organic chemical vapor deposition (MOCVD) on Pt coated sapphire substrates. We characterized the temperature dependent capacitance of graded composition BST capacitors along with single composition BST capacitors. We also report the fabrication and temperature dependent characterization of tunable RF filters fabricated with this technology.

Keywords

MOCVD; band-pass filters; barium compounds; radiofrequency filters; strontium compounds; thin film capacitors; BST film; Ba_1-xSr_xTiO₃; graded-composition MOCVD-deposited BST capacitor; metal organic chemical vapor deposition; temperature dependent capacitance; tunable RF bandpass filter; Band pass filters; Capacitance; Capacitors; Films; MOCVD; Resonator filters; Temperature dependence; BST; Tunable filters; graded composition;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics (ISAF/PFM), 2011 International Symposium on and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials

Conference_Location

Vancouver, BC

Print_ISBN

978-1-4577-1162-6

Electronic_ISBN

978-1-4577-1161-9

Type

conf

DOI

10.1109/ISAF.2011.6014112

Filename

6014112