Implementing state of the art advanced process control and factory automation solutions at White Oak Semiconductor

Author

Urenda, Tim ; Dowd, Tim ; Dimond, Kevin ; Schulze, Brad

Author_Institution

White Oak Semicond., Sandston, VA, USA

fYear

1999

fDate

1999

Firstpage

105

Lastpage

108

Abstract

This paper describes the partnership SEMY Engineering, Inc. and White Oak Semiconductor formed to successfully provide automation and advanced process control (APC) solutions from a combination of proprietary and commercially available software systems. The White Oak factory objective was to implement a computer integrated manufacturing (CIM) system providing full availability of all necessary data for yield analysis and process control. Semiconductor production throughput and reliability at White Oak has significantly increased using this implementation. A large ROI (>500%) has already been realized in the lithography cell in the first year alone

Keywords

computer integrated manufacturing; integrated circuit manufacture; process control; production engineering computing; CIM system; SEMY Engineering; White Oak Semiconductor; advanced process control; computer integrated manufacturing system; factory automation; lithography cell; reliability improvement; semiconductor production throughput improvement; software systems; yield analysis; Availability; Computer integrated manufacturing; Control system analysis; Data analysis; Manufacturing automation; Process control; Production facilities; Semiconductor device reliability; Software systems; Throughput;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference and Workshop, 1999 IEEE/SEMI

Conference_Location

Boston, MA

ISSN

1078-8743

Print_ISBN

0-7803-5217-3

Type

conf

DOI

10.1109/ASMC.1999.798192

Filename

798192