Switching performance analysis in RF MEMS capacitive shunt switches by geometric parameters trade-offs

Author

Bahmanyar, Parvin ; Mafinezhad, Kh ; Bahmanyar, M.

Author_Institution

Dept. of Eng., Ferdowsi Univ. of Mashhad, Mashhad, Iran

fYear

2010

fDate

6-9 Dec. 2010

Firstpage

831

Lastpage

834

Abstract

The high performance of Radio Frequency Micro-Electro-Mechanical Systems (MEMS) based switches like low insertion loss, high isolation and high bandwidth make them to play an important role in microwave switching. This paper presents an RF MEMS shunt capacitive switch for Ka band applications. The effect of various geometric dimensional parameters on the switching behaviour of proposed design using Electro Magnetic 3 Dimension simulator EM3DS software tool is investigated. The switch structure has been optimized on the geometrical sizes.

Keywords

capacitor switching; microswitches; microwave switches; RF MEMS capacitive shunt switches; electromagnetic 3D simulator EM3DS software; geometric dimensional parameters; geometric parameters trade-offs; geometrical sizes; microwave switching; radiofrequency microelectro-mechanical systems; switching performance analysis; Coplanar waveguides; Micromechanical devices; Microswitches; Radio frequency; RF MEMS shunt switch; geometric behaviour of MEMS switch;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems (APCCAS), 2010 IEEE Asia Pacific Conference on

Conference_Location

Kuala Lumpur

Print_ISBN

978-1-4244-7454-7

Type

conf

DOI

10.1109/APCCAS.2010.5775030

Filename

5775030