• DocumentCode
    3235748
  • Title

    AEMPES: an expert system for in-situ diagnostics and process monitoring

  • Author

    Chen, Su-Shing

  • Author_Institution
    North Carolina Univ., Charlotte, NC, USA
  • fYear
    1990
  • fDate
    21-23 May 1990
  • Firstpage
    119
  • Lastpage
    122
  • Abstract
    AEMPES (Advanced Electronic Materials Processing Expert System), an expert system for in-situ diagnostics and process monitoring, is being developed. This system is a key component of intelligent manufacturing equipment architecture and is intended to integrate the manufacturing line with its simulator. In the expert system, there are two interrelated subsystems: a neural network subsystem for adaptive process control, monitoring, and learning; and a rule-based subsystem for human interface and high-level AI (artificial intelligence) reasoning. Also presented is a neural network software, INNSE (Interactive Neural Network Simulation Environment)
  • Keywords
    computerised monitoring; expert systems; neural nets; process computer control; semiconductor technology; AEMPES; Advanced Electronic Materials Processing Expert System; INNSE; Interactive Neural Network Simulation Environment; adaptive process control; artificial intelligence; expert system; human interface; in-situ diagnostics; intelligent manufacturing equipment architecture; neural network software; neural network subsystem; process monitoring; rule-based subsystem; Adaptive control; Adaptive systems; Artificial intelligence; Artificial neural networks; Diagnostic expert systems; Electronic equipment manufacture; Materials processing; Monitoring; Programmable control; Virtual manufacturing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing Science Symposium, 1990. ISMSS 1990., IEEE/SEMI International
  • Conference_Location
    Burlingame, CA
  • Type

    conf

  • DOI
    10.1109/ISMSS.1990.66129
  • Filename
    66129