Research on gas film damping of an electrostatically levitated micromachined accelerometer

Author

Liming Wu ; Jingxin Dong ; Fengtian Han ; Zijian Li

Author_Institution

Dept. of precision Instrum. & mechanology, Tsinghua Univ., Tsinghua

fYear

2008

fDate

6-9 Jan. 2008

Firstpage

1081

Lastpage

1086

Abstract

Squeeze film damping and slide film damping for an electrostatically levitated ring-shaped proof-mass are calculated and measured. This paper has derived three-dimensional linearized Reynolds equations for the electrostatically levitated accelerometer based on slip flow condition and Couette fluid model of slide film damping respectively. The gas film damping is determined by using analytic solution with the motion of the proof-mass in five degrees of freedom. Both motion of the proof-mass and temperature effect have been taken into account in gas film damping calculation. The simulated results show that squeeze film damping has dominant effect on dynamics of levitated systems. Electrometric method is utilized to test gas film damping of a levitated accelerometer in axial direction. Experimental results are compared with theoretical analysis.

Keywords

accelerometers; micromachining; microsensors; 3D linearized Reynolds equations; Couette fluid model; analytic solution; electrometric method; electrostatically levitated accelerometer; electrostatically levitated ring-shaped proof-mass; gas film damping; micromachined accelerometer; slide film damping; slip flow condition; squeeze film damping; Accelerometers; Control systems; Damping; Electrodes; Electrostatic measurements; Equations; Mathematical model; Microstructure; Position measurement; Scanning electron microscopy; electrostatic levitation; micro-silicon accelerometer; slide film damping; squeeze film damping;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on

Conference_Location

Sanya

Print_ISBN

978-1-4244-1907-4

Electronic_ISBN

978-1-4244-1908-1

Type

conf

DOI

10.1109/NEMS.2008.4484506

Filename

4484506